MCM-Graphene is a state-of-the-art CVD system dedicated to deposit high quality graphene. The system has computer-controlled flow rate, temperature and pressure measurement/control hardware, which can further be customized according to costumer demands. The furnace, which is capable of providing up to 1200 oC constant temperature, can be slided with the help of integrated motor assembly, which is also computer-controlled.

Basic Specifications:

• A fully integrated software allows measurement and track the process parameters.

•   Automatic furnace sliding and fast-cooling mechanism

• Capable of housing 2-inch substrates.

• Three integrated mass flow controller

•  A pirani vacuum gauge for pressure measurement

• Rotary-vane vacuum pump 

• A sliding programmable tubular furnace having 25 cm constant temperature zone, 1200 oC max operating temperature.

Options:

• Upstream and downstream PID pressure control

•  Additional mass flow controllers

• Temperature controlled bubbler for liquid precursors