MCM-R2R is a roll-to-roll CVD system dedicated to coat functional polymers on flexible substrates. Textile fabric, PET sheet, paper, etc. can be used as substrates. MCM-R2R can be operated either in HFCVD or PECVD modes. 

Basic specifications:

• A PC loaded with MCM-CVD software is included for fully automatic system operation, process sequencing, multiple recipe storage, and other advanced features

• Water-circulated substrate cooling.

• Speed-controlled stepper motor for rotation in two directions

• One MFC and 2 needle valves for flow control

• Capacitance vacuum gauge for pressure measurement

• PID pressure (downstream) and temperature  controls

• Rotary-vane vacuum pump 

• 5 x 10-3 torr ultimate chamber vacuum

• In-situ thickness monitoring

Options:

• Additional mass flow controllers & valves

• Temperature controlled bubbler for liquid precursors